http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111380633-A

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filingDate 2018-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_342ba70a9e4652035a318d73f157121e
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publicationDate 2020-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-111380633-A
titleOfInvention Cross-scale film stress test system and test method
abstract The invention designs a cross-scale film stress test system and a test method, wherein a sample film is firstly placed on a sample plate, light signals are changed into amplified electric signals after being received and processed by an array line CCD (charge coupled device) through the reflected light of helium neon laser passing through the uneven film, the warping degree is obtained through computer calculation, the macroscopic stress of the film is obtained after formula derivation, and the region needing further measurement is determined. The local microscopic stresses are then measured using the X-ray diffraction principle, without moving the specimen. The X-ray is reflected by the crystal faces to obtain a plurality of beams of diffraction lines, the deformation among the crystal faces is obtained by utilizing the diffraction condition of the X-ray, and the stress on the micro-crystal is obtained by calculation. The technical method of the invention can greatly save the time and materials for monitoring the macroscopic warping condition and the microscopic grain arrangement state of the film material, and realize the detection of the stress state of the film material according to the measurement result. The method has the advantages of simple and quick operation, time and cost saving and wide application range.
priorityDate 2018-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 30.