| abstract |
Presented here is the plasma polymerization apparatus and process. Exemplary embodiments include a vacuum chamber that is substantially symmetrical about a central axis. The rotating frame is operable to rotate about a central axis of the vacuum chamber. Additionally, a reactive species release mechanism positioned from the outer perimeter of the vacuum chamber in a substantially symmetrical manner around the perimeter of the vacuum chamber can be configured to disperse the reactive species into the vacuum chamber. The reactive species can form a polymeric multilayer coating on the surface of one or more devices. Each layer can have a different atomic composition to enhance the water resistance, corrosion resistance, and abrasion resistance of the polymeric multilayer coating. |