http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111326415-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fb0b90e30bd927cbbb372c40581029b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32963 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-0387 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e47e9af6feac158b413517370adba8f |
| publicationDate | 2020-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111326415-A |
| titleOfInvention | Methods of forming high aspect ratio features in semiconductor wafers |
| abstract | The present invention provides a method for forming a high aspect ratio (High Aspect Ratio, HAR for short) feature in a semiconductor wafer. The method includes the steps of: the wafer is placed in a processing chamber of an etching apparatus; etching the first nitride layer of the wafer towards the first oxide layer of the wafer for a predetermined duration; The second nitride layer is etched, while using the endpoint detector of the etching equipment to monitor the parameters in the processing chamber; the control unit of the etching equipment judges whether the parameters in the processing chamber detected by the endpoint detector exceed a predetermined value; if the endpoint detector If the detected parameter exceeds a predetermined value, the end point of etching of the first oxide layer of the wafer is marked. |
| priorityDate | 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.