http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111257071-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-364 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2866 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-366 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-36 |
| filingDate | 2020-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111257071-B |
| titleOfInvention | A kind of preparation method of sample for dynamic secondary ion mass spectrometer and the prepared sample |
| abstract | The invention relates to the technical field of semiconductors, and in particular to a method for preparing a sample for a dynamic secondary ion mass spectrometer and the prepared sample. The method includes the following steps: preparing a sample whose side length or diameter is less than or equal to 2 mm to be tested. Place it face down on a flat carrier with a melting point higher than 250°C; place a fixing sheet on both sides of the sample, one side of the fixing sheet is attached to the upper surface of the carrier, the fixing sheet is conductive and has a melting point higher than 250°C; place a barrier along the periphery of the fixing sheet and the sample, and the bottom surface of the barrier is attached to the upper surface of the carrier; add liquid embedding material on the carrier in the barrier, until the embedding material solidifies; take out to obtain the connection on both sides Samples with fixed pieces. The invention provides a feasible solution for DSIMS testing of small samples, and the prepared sample improves the vacuum value of the DSIMS testing chamber and reduces the detection limit of testing elements. |
| priorityDate | 2020-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 20.