http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111250873-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-702 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0648 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-362 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-0622 |
| filingDate | 2020-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111250873-B |
| titleOfInvention | Deep super-resolution laser direct writing system based on GB-STED and implementation method thereof |
| abstract | The invention discloses a deep super-resolution laser direct writing system based on GB-STED and an implementation method thereof. According to the invention, a first-order Gauss Bessel beam is used as annihilation light, the super-resolution direct writing capability can be still kept when the first-order Gauss Bessel beam penetrates into a sample, a phase plate is strictly placed at the front focal plane of an annihilation light beam expanding system, the rear focal plane of the annihilation light beam expanding system is strictly superposed with the entrance pupil of an objective lens, and the light path is compact; the annihilation light filtering system adopts the polarization maintaining optical fiber, and the annihilation light path eliminates a polaroid and a half-wave plate, thereby reducing the influence on the appearance of a light spot and ensuring that emergent light is linear polarized light; the excitation light and the annihilation light are respectively added with spatial filtering, so that the shape of a light spot during focusing is optimal, and the shape of a direct-writing structure can be better controlled; a pair of coupling adjusting reflectors are adopted to adjust the combined beam, so that the requirement of the beam combining mirrors on a stricter incident angle is met; the camera is used for observation, rough adjustment is carried out, the signal detector is used for observation, fine adjustment is carried out, adjustment precision is improved, and adjustment efficiency is improved. |
| priorityDate | 2020-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62556 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415730828 |
Total number of triples: 22.