http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111208400-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_453ce5892ba322c0a8b5ca23c8a5eee5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2018-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac04e0413e02e7f54fb6298b3eb461ac |
| publicationDate | 2020-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111208400-A |
| titleOfInvention | A kind of wafer testing equipment and testing method |
| abstract | Embodiments of the present invention disclose a wafer testing device and a testing method, which relate to the technical field of silicon wafer testing, and can provide a vacuum testing environment, thereby meeting the requirements for vacuum testing of wafers. It includes: a vacuum system and a test bench, the vacuum system includes a box body and a vacuum module connected to the box body, the test platform is arranged in the box body; the vacuum module includes a vacuum pump, so The test table includes a carrier for placing wafers, and probes for testing the wafers. The invention is suitable for performance testing of semiconductors, optoelectronic components, integrated circuits, etc., and is especially suitable for testing wafers. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112858860-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114789123-A |
| priorityDate | 2018-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.