http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111188012-A

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filingDate 2018-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a7f2b9ac80d1dde960e8005b388b21e
publicationDate 2020-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-111188012-A
titleOfInvention Evaporation device and preparation method of evaporation film, electroluminescent device and preparation method
abstract The invention relates to an evaporation device and a preparation method of an evaporation film, an electroluminescence device and a preparation method thereof. In the preparation method of the electroluminescent device, when the intermediate electrode layer is formed, the conductive material is deposited on the corresponding light-emitting unit by means of evaporation. The damage of the light-emitting unit improves the light-emitting performance of the device. And in the process of evaporation, the temperature of the part to be evaporated is lowered to reduce the temperature of the part to be evaporated, which can prevent the deposited conductive materials from gathering into clusters due to excessive temperature, which is beneficial to improve the film formation of conductive materials. The uniformity and continuity are beneficial to obtain a thinner vapor deposition film, so the conductivity and light transmittance of the intermediate electrode layer can be improved, and the luminous performance of the device can be further improved.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112626482-A
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