http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111182428-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-02 |
| filingDate | 2019-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111182428-B |
| titleOfInvention | MEMS speaker and manufacturing method thereof |
| abstract | The invention discloses an MEMS loudspeaker and a manufacturing method thereof, wherein the MEMS loudspeaker comprises a substrate, a vibration component, a diaphragm and a connecting rod, the substrate comprises a base and a supporting seat extending from one side of the base, the base is provided with a first cavity body in a penetrating manner along the thickness direction of the base, the supporting seat is annular and encloses to form a second cavity body communicated with the first cavity body, and the inner diameter of the first cavity body along the direction vertical to the thickness direction is smaller than that of the second cavity body; the vibration component is fixed on the substrate and at least covers part of the first cavity, one end of the connecting rod is connected with the vibration component, the other end of the connecting rod extends to the second cavity through the first cavity and is connected with the diaphragm, and the diaphragm is suspended in the second cavity and is arranged at intervals with the inner wall of the supporting seat. The MEMS loudspeaker of the invention generates sound by driving the diaphragm to do piston motion through the vibration component, so that more air can be discharged in unit time, thereby improving the sound output of the MEMS loudspeaker. |
| priorityDate | 2019-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.