| abstract |
The invention provides a detection system of electronic-grade tetramethylammonium hydroxide, which comprises a sample introduction unit, a detection unit and a control unit; the detection unit is connected with the sample introduction unit and is controlled by the control unitThe chroma, TMAH and CO of the detection sample are prepared 3 ‑ Concentration, Cl ‑ Concentration, methanol concentration, impurity ion concentration, and particle count; the detection system for the electronic-grade tetramethylammonium hydroxide is simple to operate, can quickly detect various parameters in the electronic-grade tetramethylammonium hydroxide product, and improves the detection efficiency of the electronic-grade tetramethylammonium hydroxide product. |