| abstract |
The present invention provides a method for producing a laminate which can easily bond a substrate and a support via a temporary adhesive material, is excellent in thermal process resistance, is easy to peel, and can improve the productivity of thin substrates. The manufacturing method is characterized in that the unprocessed surface of the substrate whose back surface is to be processed and the support body are joined via a temporary adhesive material, characterized in that the manufacturing method includes laminating on either or both of the unprocessed surface of the substrate and the support body. The step (a) of the temporary adhesive material; the step (b) of heating the substrate and the support in advance before starting the bonding; the step (c) of bonding the substrate and the support via the temporary adhesive material, in the step (b), The substrate is heated to a temperature of 50° C. or higher and 250° C. or lower, the support is heated to a temperature of 50° C. or higher and 250° C. or lower and a temperature different from the substrate, and in step (c), the temperature of the pre-heated substrate and the support are Bonding begins when the body temperature is different. |