http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111128681-B
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate | 2019-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-111128681-B |
titleOfInvention | A kind of manufacturing method of temperature measuring silicon wafer and temperature measuring silicon wafer |
abstract | The invention discloses a manufacturing method of a silicon wafer for temperature measurement, comprising the following steps: S1, applying a masking layer on the surface of the silicon wafer; S2, selective photolithography, etching Pt grooves on the masking layer; S3 , etching the Pt groove on the upper surface of the silicon wafer; S4, forming a Pt film layer in the Pt groove; S5, removing the glue; S6, repeating the step S1; S7, etching the rhodium gold groove on the masking layer; S8 , Etch the rhodium-gold groove on the upper surface of the silicon wafer; S9, form a layer of rhodium-gold film in the rhodium-gold groove; S10, remove the glue; S11, place the silicon wafer in a diffusion furnace for diffusion; S12, connect the two wires Bonding on the outer end of the Pt film layer and the outer end of the rhodium-gold film layer respectively; S13, riveting the lead-out metal sheet on the silicon wafer, fixing the wire on the lead-out metal sheet and exporting it. The connection between the manufacturing method and the manufactured temperature measuring silicon wafer and the thermocouple is very firm and will not loosen. |
priorityDate | 2019-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 194.