http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111117626-B
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
filingDate | 2019-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-111117626-B |
titleOfInvention | A kind of flash erosion potion and its preparation method and application |
abstract | The invention provides a flash etching liquid and a preparation method and application thereof. The flash etching liquid comprises the following components dissolved in deionized water: sulfuric acid 50-100 g/L; hydrogen peroxide 10-50 g/L; copper ions 5-45g/L; mixed alcohol 10-35g/L; the balance is deionized water; wherein, the mixed alcohol is a combination of any two alcohols. The flash etching solution provided by the present invention can effectively remove the bottom copper and reduce the side etching, and at the same time effectively protect the edges and corners of the line, maintain the rectangular shape of the line cross-section, and can be suitable for the MSAP process; at the same time, the flash etching solution provided by the present invention has the advantages of Better storage stability. |
priorityDate | 2019-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.