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filingDate 2018-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3b00776375e9f83856d2e2cf3f5cc87
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publicationDate 2020-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-111093843-A
titleOfInvention Manufacturing method of thin film
abstract The present invention provides a method for producing a thin film, comprising: step A, applying a coating liquid on a support to form a coating film, the coating liquid containing at least a film-forming compound selected from the group consisting of fluorinated aliphatics The viscosity of a solution obtained by dissolving at least one of a polymer having a siloxane structure in methyl ethyl ketone at a solid content of 55% by mass was 15 mPa at a liquid temperature of 60° C. s or more polymer and solvent; in step B, the coating film formed in step A is dried at a rate that exhibits a mass change of 0.02 g/m 2 /s or more and 0.1 g/m 2 /s or less to satisfy the requirements In the condition A, the time of t seconds or more is twice the second; and in the step C, the coating film after the step B is applied to the coating film after the step B at a speed that shows a mass change of 0.02 g/m 2 /s or more and 0.2 g/m 2 /s or less. Dry.
priorityDate 2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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