| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2203-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-32 |
| filingDate |
2018-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-111051389-B |
| titleOfInvention |
Polycarbosilane-containing composition for forming silicon carbide film, and method for producing silicon carbide film using same |
| abstract |
[ problem ] to]The invention provides a composition containing polycarbosilane, which has excellent embeddability, can be formed at a lower temperature, and has excellent electrical characteristics of the produced film. [ solution ]]A composition for forming a silicon carbide film, comprising polycarbosilane and a solvent, the polycarbosilane 1 The ratio of the cumulative intensity of 3.92 to 4.20ppm to the cumulative intensity of 3.60 to 5.50ppm in the H-NMR spectrum is 27 to 50%. |
| priorityDate |
2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |