| abstract |
Embodiments described herein relate to integrated abrasive (IA) polishing pads, and methods of making IA polishing pads that use surface-functionalized abrasive particles at least in part in an additive manufacturing process, such as a 3D inkjet printing process. In one embodiment, a method of forming a polishing article includes: dispensing a first plurality of droplets of a first precursor; curing the first plurality of droplets to form a first layer, the first layer including sub-polishing elements a portion of the first precursor and a second plurality of droplets of the second precursor onto the first layer; and curing the second plurality of droplets to form a second layer, the first The second layer includes portions of the sub-polishing elements and portions of a plurality of polishing elements. Here, the second precursor includes functionalized abrasive particles having polymerizable groups chemically bonded to the surface of the functionalized abrasive particles. |