http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110993731-B

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classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-035227
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0352
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-109
filingDate 2019-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-110993731-B
titleOfInvention Preparation method of visible-shortwave infrared light detection substrate based on oxide/gold nanorod/silicon
abstract The invention relates to a preparation method of a visible-short wave infrared light detection substrate based on an oxide layer/gold nanorods/silicon, which synthesizes small-size gold nanorods with different length-diameter ratios by a silver-induced seedless method; loading the gold nanorod/silicon chip substrate on the surface of a silicon chip as a light absorption layer, and annealing to obtain a more tightly combined gold nanorod/silicon chip substrate; different oxide films are deposited on the surface of the gold nanorod/silicon composite substrate to construct a heterojunction structure with good photoelectric response, and finally the novel visible-short wave infrared light detection substrate of the oxide/gold nanorod/silicon substrate is obtained. The composite substrate can show extremely high detection sensitivity to visible-short wave infrared light. Compared with the prior art, the detection substrate obtained by the invention has the advantages of wide spectral response range, high response sensitivity, adjustable response wave band, strong anti-interference capability and the like.
priorityDate 2019-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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