http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110967379-A

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filingDate 2019-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b0eb3c7eceae6836d47c40a116768a6
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publicationDate 2020-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-110967379-A
titleOfInvention Piezoelectric Biosensors and Related Formation Methods
abstract In some embodiments, a piezoelectric biosensor is provided. The piezoelectric biosensor includes a semiconductor substrate. The first electrode is disposed over the semiconductor substrate. The piezoelectric structure is disposed on the first electrode. The second electrode is disposed on the piezoelectric structure. A sensing reservoir is disposed over the piezoelectric structure and exposed to the ambient environment, wherein the sensing reservoir is configured to collect fluid comprising a plurality of biological entities.
priorityDate 2018-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 30.