http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110880676-A

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filingDate 2019-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_876f38da7d73311853dc59aa4fe8cc46
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publicationDate 2020-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-110880676-A
titleOfInvention A kind of preparation method of semiconductor laser
abstract The invention relates to the technical field of semiconductor lasers, in particular to a preparation method of a semiconductor laser. The method includes: providing an epitaxial structure of a stacked semiconductor laser; wherein, the epitaxial structure includes an aluminum-containing epitaxial layer; dry etching the epitaxial structure to form a stripe structure with a steep and smooth sidewall; The strip structure is subjected to wet oxidation, and an oxide medium layer is formed on both sides of the aluminum-containing epitaxial layer; wherein, the oxide medium layer serves as a lateral current confinement layer and a lateral waveguide layer of the stacked semiconductor laser. Through the lateral current confinement layer and the lateral waveguide layer, the lateral expansion of the operating current of the semiconductor laser can be suppressed, so that each layer of the quantum well active region is injected with a consistent current intensity and density, which reduces the threshold current of the laser and suppresses the optical field. Lateral expansion achieves a laser spot of consistent size and intensity.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114006268-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112636175-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114300945-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023130711-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114696217-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113991428-B
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Total number of triples: 34.