http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110867360-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-147 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 |
| filingDate | 2019-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110867360-B |
| titleOfInvention | Plasma etching device for etching optical device |
| abstract | The invention discloses a plasma etching device for etching optical devices, which comprises a shell, a workbench and a case which are sequentially arranged from top to bottom, wherein a sucker is welded at the top of the extension end of a hollow shaft, a transmission device capable of driving the hollow shaft to rotate is arranged between an output shaft of a motor and the hollow shaft, an electrode column is welded at the top of a horizontal pipe, an electrode plate is welded at the upper end of the electrode column, the electrode plate is in contact with the inner wall of the top of the sucker, the lower end of the electrode column extends into the horizontal pipe, a lead B is fixedly arranged on the extension end, and the extension end of the lead B is connected with a second high-frequency power supply; an antenna extending into the closed cavity is arranged on the cover plate, the top of the antenna is connected with a lead A, and the other end of the lead A is connected with a first high-frequency power supply; the shell is provided with an electromagnetic valve and a pressure relief valve, and the other end of the electromagnetic valve is connected with a gas cylinder storing a gas source. The invention has the beneficial effects that: the etching efficiency and the optical device cooling efficiency are improved, and the automation degree is high. |
| priorityDate | 2019-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.