| abstract |
The present invention provides a test structure, which includes a serpentine metal wire and two test comb structures arranged in a relatively staggered manner, each test comb structure is divided into at least two sub-comb structures, and each of the test comb structures is divided into two sub-comb structures. There is an interval between two adjacent sub-comb-shaped structures, and at least one of the serpentine metal wires in at least one of the intervals in each of the test comb-shaped structures has a pad drawn out . That is, the test structure is divided into several small-area test structures by the above method, which can solve the problem that EBIRCH cannot locate the short-circuit point of nA level leakage of the super-large area structure; The short-circuit point of the nA-level leakage of the super-large area structure, so as to find the root cause of the failure, can be of great help to solve the process problems and promote the progress of research and development. |