http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110797245-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00d1ab86970161b516a8aa89aa1b0446 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate | 2019-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8be1e1a4ef2521fa8c610fa789fc6b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4abbe87e8daaaf5fb36287046b8da5e8 |
| publicationDate | 2020-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110797245-A |
| titleOfInvention | A semiconductor processing equipment |
| abstract | The present invention relates to a semiconductor processing equipment. In an embodiment of the present invention, the semiconductor processing equipment includes a reaction chamber, in which a base for carrying the workpiece to be processed is disposed; a first plasma generation chamber, communicated with the reaction chamber, is used for the direction to provide the ion beam to the workpiece to be processed; the second plasma generation chamber, the second plasma generation chamber is arranged in communication with the reaction chamber, and the distance between the outlet of the second plasma generation chamber and the base is greater than the preset distance , so as to provide free radicals to the workpiece to be processed along the second direction; wherein, the first direction and the second direction form a certain angle. |
| priorityDate | 2019-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.