| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2019-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8941b9fa39b55eefcb54dc8b3e875a60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81388582b1b234325fcebc43d5182e37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1987bd202bdd955ddc0d0232e717ac24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52e8913cdf3fee75f9b3946ded25c80b |
| publicationDate |
2020-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110776830-A |
| titleOfInvention |
Polishing composition for chemical mechanical polishing process |
| abstract |
The polishing composition for the chemical mechanical polishing process comprises a plurality of polishing particles, at least one chemical additive and a non-aqueous solvent. |
| priorityDate |
2018-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |