| abstract |
The present patent application relates to novel metal complexes with at least one N-aminoguanidino ligand. The present patent application further relates to the preparation of this novel metal complex and to its use. The novel metal complexes are particularly suitable as precursors for the preparation of functional layers by vapor-phase thin film processes such as CVD, MO-CVD, MOVPE and ALD. Furthermore, they are also suitable as catalysts for the hydroamination and polymerization of olefins. |