http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110676266-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1259 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2019-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110676266-B |
| titleOfInvention | TFT substrate, preparation method thereof and display device |
| abstract | The invention discloses a TFT (thin film transistor) substrate, a preparation method thereof and a display device, which can enable the line width of a copper film layer in a back channel etching-indium gallium zinc oxide type TFT substrate to be thinner, so that the TFT substrate can be applied to wiring with higher resolution, and meanwhile, a molybdenum film layer serving as a channel bottom layer is subjected to dry etching through NF3 and O2 etching gases so as to prevent the indium gallium zinc oxide film layer from being damaged. |
| priorityDate | 2019-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.