http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110649033-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11578 |
| filingDate | 2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110649033-B |
| titleOfInvention | 3D memory device and method of manufacturing the same |
| abstract | The present application discloses a 3D memory device and a manufacturing method thereof. The 3D memory device includes: a substrate; a gate stack structure, located on the substrate, including a plurality of gate conductor layers and a plurality of interlayer insulating layers stacked alternately, the plurality of gate conductors from the cell a plurality of channel pillars and a plurality of dummy channel pillars, respectively in the cell region and through the gate stack structure in the peripheral region, the plurality of channel pillars reach a common source region in the substrate; a plurality of gate line slits extend from the cell region to the peripheral region, And the plurality of gate conductors are respectively separated into a plurality of gate lines; and a plurality of dummy gate line slits, extending in the cell region to the boundary between the cell region and the peripheral region. The 3D memory device adopts the dummy gate line gap to reduce the stress gradient at the cell region and the boundary, so as to improve the yield and reliability of the 3D memory device. |
| priorityDate | 2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.