| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-54373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2437
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036 |
| filingDate |
2014-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110632171-B |
| titleOfInvention |
Sensor, method and apparatus for forming a sensor |
| abstract |
The disclosed sensors can include at least one resonator (in some embodiments, at least two resonators) and various other structures that can be formed in conjunction with the resonators. In an embodiment at least one resonator may include a bottom electrode, a piezoelectric layer, and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode. |
| priorityDate |
2013-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |