http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110596801-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1857 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18 |
| filingDate | 2019-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110596801-B |
| titleOfInvention | Blazed grating, preparation method and application thereof |
| abstract | The present invention relates to a blazed grating and its preparation method and application. The preparation method of the blazed grating includes the following steps: using a first resist to form a first resist layer on a substrate; exposing and developing the first resist layer to form a first resist layer with a pattern; A metal layer is formed on the bottom, and the metal layer covers the first resist layer; the first resist layer is removed to obtain a metal layer with a plurality of metal strips arranged at intervals; a second resist layer with a plurality of resist strips is formed on the substrate The etching layer, a plurality of resist strips and a plurality of metal strips are alternately arranged, and each resist strip is connected with an adjacent metal strip to form a pattern unit, and the plurality of pattern units are arranged at intervals; One side of the resist layer is ion-etched on the substrate, so that the second resist layer is etched and a plurality of inclined planes are formed on the substrate; the metal layer is removed to obtain a blazed grating. The preparation method of the above-mentioned blazed grating is simple and can obtain nano-sized blazed grating. |
| priorityDate | 2019-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.