http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110527988-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2c8295cd81d811d513f70b75c781a938 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0227 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate | 2019-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16510521eb7dc71588f4ee2c0c48c65a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ba123186c3353bb770853f3f1c23ed0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fea1688db236588758e15ef523b50dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d46a32ed25b955b039fdd9efabfe925f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3725124d2173869bb8fafb2d6cca91e |
| publicationDate | 2019-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110527988-A |
| titleOfInvention | Heterojunction solar battery on-line continuous filming equipment and the method for carrying out plated film |
| abstract | The invention discloses heterojunction solar battery on-line continuous filming equipment and the methods for carrying out plated film, it include: at least one include ante-chamber, reaction chamber, the coated process chamber of back cavity, sequentially pass through ante-chamber, reaction chamber, the support plate of the placement solar battery of back cavity, velocity interval is 1-500mm/s when support plate passes through reaction chamber, and the capacitance coupling type slab construction for forming amorphous silicon membrane in the substrate surface of solar battery by plasma activated chemical vapour deposition mode is set in reaction chamber, and make the RF/VHF radio-frequency power supply of slab construction rate of connections 1MHz-150MHz, so that reaction chamber can carry out continuous plated film production to substrate, it avoids and vacuumizes, the waste of time caused by vacuum breaker, high production efficiency, when continuous production, multiple support plates carry out plated film continuously across reaction chamber The RF/VHF radio-frequency power supply of operation, above-mentioned slab construction connection is kept it turned on, and avoids the coating quality for frequently opening radio frequency source influence heterojunction solar battery substrate, and quality of forming film is good. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111739971-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111739971-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022027994-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111172518-A |
| priorityDate | 2019-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5943 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527288 |
Total number of triples: 27.