http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110512190-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81ca9a5f1da06521982d5a6b55b04244 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2019-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8710e678a31dc20e88be4a8b03f50711 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a87770a4c40c94e1a5ec44b79d9d036f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64fdeec042b0fbf34356c255976d4d71 |
| publicationDate | 2019-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110512190-A |
| titleOfInvention | Modification mechanism integrating pneumatic valve group, pneumatic valve group device, vapor deposition equipment |
| abstract | The present invention provides a retrofit mechanism for an integrated pneumatic valve group, wherein the integrated pneumatic valve group includes a first pneumatic valve, a second pneumatic valve, a first pipeline and a second pipeline, and the first pneumatic valve and The first pipeline is connected, the second pneumatic valve is connected to the second pipeline, and the first pipeline and the second pipeline are connected and communicated after connecting with the corresponding pneumatic valve. The mechanism includes at least one non-integrated pneumatic valve, the non-integrated pneumatic valve is detachably arranged in the first pipeline between the first pneumatic valve and the second pneumatic valve through corresponding pipelines, the The second pipeline or the confluence of the first pipeline and the second pipeline. By installing a non-integrated pneumatic valve in the integrated pneumatic valve group, the internal leakage problem caused by the long-term contact of the reaction gas with the first pneumatic valve is solved. production capacity. |
| priorityDate | 2019-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.