| abstract |
The invention discloses a phase recovery detection device and a phase recovery method based on the fusion of Fresnel zone plate diffraction information. The device comprises a laser, an attenuator, a microscope objective lens, a pinhole filter and a collimating objective lens arranged in sequence along the direction of the optical path. , Component to be tested, Fresnel zone plate, image acquisition device. The device uses a Fresnel zone plate instead of a traditional lens as a beam condensing element, and utilizes the multi-focal characteristics of the Fresnel zone plate, so that the collected diffracted light spot contains more diffraction information. The method uses the diffracted light intensity distribution modulated by the Fresnel zone plate to recover, and can reconstruct a wider frequency band of the wavefront to be measured. The device is simple, and the broadband diffraction information can be collected without changing the defocus position, and the method has higher algorithm convergence speed and wavefront reconstruction accuracy, and has high accuracy in detecting wide-band large wavefront errors. |