http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110433878-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0809 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0887 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502707 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-183 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 |
| filingDate | 2019-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110433878-B |
| titleOfInvention | Liquid detection chip based on VCSEL coupling array optical phase difference |
| abstract | A liquid detection chip system based on VCSEL coupling array optical phase difference belongs to the cross technical field of semiconductor laser technology and biochemical detection technology. The invention realizes the preparation of the VCSEL coupling array by adopting the technologies of proton injection, cavity induced inverse waveguide, photonic crystal and the like. And integrating the microfluidic structure on the surface of the VCSEL coupling array by processes of PECVD, photoetching, sputtering, reactive ion etching, wet etching, bonding and the like. The micro-fluidic technology is utilized on the upper surface of the VCSEL coupling array, liquid to be detected is introduced above the VCSEL coupling array units, light beam coupling phase difference among the VCSEL units is changed, laser beams are deflected, the refractive index of the liquid can be calculated by measuring the deflection angle of the laser beams, and liquid refractive index detection is achieved. |
| priorityDate | 2019-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.