http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110426451-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-2697 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2019-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110426451-B |
| titleOfInvention | Etching rate measuring device and lateral etching rate measuring method |
| abstract | An etching rate measuring apparatus and a lateral etching rate measuring method are provided, the etching rate measuring apparatus includes a quartz crystal oscillating piece for outputting an oscillation frequency; the current collector layer is uniformly formed on the quartz crystal oscillation sheet and is used as an electrode; a thin film metal layer formed on the current collector layer; the shielding layer is formed on the thin film metal layer and used for shielding the part, which is not etched, in the thin film metal layer; the external circuit is electrically connected with the current collector layer; the current from the external circuit is collected by the current collecting layer, an electric field is applied to the quartz crystal oscillating piece, and the quartz crystal oscillating piece outputs a corresponding oscillating frequency according to the mass of the thin film metal layer. The lateral etching rate measuring method obtains the lateral etching rate of a thin film metal layer to be measured through the etching rate measuring device according to the equation (1): |
| priorityDate | 2019-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.