http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110376136-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D23-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D23-20 |
| filingDate | 2019-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110376136-B |
| titleOfInvention | Device and method for measuring optical constant and morphological parameter of film under high temperature loading |
| abstract | The invention belongs to the technical field related to optical measurement, and particularly discloses a device and a method for measuring an optical constant and a morphological parameter of a thin film under high-temperature loading. The device comprises an optical constant measuring module and a high-temperature heating module, wherein the high-temperature heating module comprises a high-temperature heating cavity, a quartz glass window, a high-temperature heating table, a high-temperature table controller and a gas flow passage unit, and the optical constant measuring module comprises an incident light path unit and a reflection light path unit. The method comprises the steps of obtaining real ellipsometric parameters of a sample according to the calibrated ellipsometric parameters, and obtaining optical constants and morphological parameters of the sample according to an optical constant parameterization model and a forward optical model of the sample. The device can calibrate the ellipsometric parameter deviation introduced by the quartz glass window under different heating temperatures in a wider thermal temperature range, and construct a reductive measurement gas atmosphere, so that the device can more accurately measure and obtain the optical constant and the morphological parameter of the sample to be measured. |
| priorityDate | 2019-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.