http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110364583-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-113 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2019-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110364583-B |
| titleOfInvention | TiO2Preparation method of film, photoelectric detector and preparation method thereof |
| abstract | The invention discloses a TiO 2 2 A preparation method of a film, a photoelectric detector and a preparation method thereof relate to the technical field of photoelectric detection. The invention utilizes TiO prepared by calcining ALD (atomic layer-by-layer deposition method) in an oxygen-containing environment 2 Film, on the one hand TiO 2 The film is transformed from amorphous to local single crystal to form a fish scale-shaped appearance; on the other hand, the oxygen defect is reduced, the concentration of electrons in the material is reduced, the recombination of photon-generated carriers is reduced, the formation of photocurrent is facilitated, and the magnitude of dark current is also reduced; the photoelectric detection device made of the material improves the photoelectric detection performance of the device; the device has the capability of regulating and controlling the spectral response by the grid voltage. |
| priorityDate | 2019-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.