http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110340747-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d40285e27f4ed83b8728b0d477404958 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B1-04 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-04 |
filingDate | 2019-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bcd4e7df772f4cf04d8044c58d360f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fda1888aa804daca1eb98d742e45ab10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e157539151c4dfe6c9f088f1168ecf37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc4a8ff7c69442c0decac01a48d214a0 |
publicationDate | 2019-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-110340747-A |
titleOfInvention | Bubble-controlled micro-ultrasonic sphere emission profiling array grinding and polishing method and device |
abstract | The invention discloses a method and a device for the grinding and polishing of a micro-ultrasonic sphere emission profiling array by controlling the bubbles. The vibration of a micro-ultrasonic grinding and polishing mold excites the high-frequency impact of the nano-scale abrasive particles in the sphere and the grinding and polishing liquid on the surface of the silicon carbide workpiece to be processed. , to achieve material removal. The invention greatly improves the processing efficiency of the micro-hemispherical concave die array, and ensures the shape consistency of the concave die by adjusting the air bubbles. |
priorityDate | 2019-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.