| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136295 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02 |
| filingDate |
2019-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110284139-B |
| titleOfInvention |
Etchant composition and method of making metal pattern and array substrate using the same |
| abstract |
The etchant composition of the embodiment of the present invention includes a persulfate, a tetra-nitrogen ring compound, a carbonyl ring compound having two or more carbonyl groups, and water, and the weight ratio of the tetra-nitrogen ring compound and the carbonyl ring compound is About 1:0.1 to about 1:2. The etchant composition can etch titanium/copper multilayers and can be used to fabricate metal patterns and array substrates with excellent etch pattern characteristics. |
| priorityDate |
2018-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |