| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32798
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2019-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6700654df0f17e209be2ab02283299f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb7839eb1cd0f7bdfd02da8cde9b39bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee1ac460c125b7c08f5a5f7c22a6d517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_388bb1b17bc332df66ab94a171d1db8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dde1caac55dac74130e411b11fcc5018 |
| publicationDate |
2019-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110223945-A |
| titleOfInvention |
Quartz components with protective coating |
| abstract |
The present invention relates to quartz components with protective coatings. The quartz structure includes a protective layer comprising yttrium oxide. The quartz structure can be fabricated by: (a) receiving the quartz structure; and (b) coating the quartz structure with a protective layer comprising yttrium oxide to form a component to be used in a plasma reactor. The part is sized and shaped to form a window or injector in a plasma reactor. The protective layer does not substantially alter the size or shape of the quartz structure. The component may be installed in the plasma reactor in a position such that the plasma will contact or be close to the component during operation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112908822-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113013055-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I781488-B |
| priorityDate |
2018-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |