http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110172735-B
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-00 |
filingDate | 2019-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-110172735-B |
titleOfInvention | Single crystal tin selenide thermoelectric film and preparation method thereof |
abstract | The invention relates to a single crystal tin selenide thermoelectric film and a preparation method thereof, belonging to the field of thermoelectric materials. The preparation method of the single crystal tin selenide thermoelectric film comprises the following steps: taking a substrate, placing the substrate in a cleaning solution, ultrasonically cleaning for 10min, drying for 2h at the temperature of 60-150 ℃ after cleaning, taking out and naturally cooling; putting the processed substrate on a spin coater, dripping dispersion liquid on the surface of the substrate, spin-throwing for 10-60s, taking out the substrate after spin-throwing, and drying at 200 ℃ for 5-10min to obtain a buffer layer substrate; and putting the tin selenide sputtering target material and the prepared buffer layer substrate into a high-vacuum multifunctional magnetron sputtering coating instrument, vacuumizing, heating the buffer layer substrate, introducing inert gas, and sputtering for 20-60min to obtain the single crystal tin selenide thermoelectric film. The preparation method has the advantages that the preparation process is simple, and the prepared single-crystal tin selenide thermoelectric film has good single-crystal property and high power factor. |
priorityDate | 2019-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.