http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110171974-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bced9d1cd00be5d778ab1152751eef1f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-445 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-547 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-547 |
| filingDate | 2019-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bc949261336b96493103f38d052d04d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d8c2094b9b771bd43c564357664af89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaf27cfaf4ca437ed44ba7dfe3d9e2b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e983a629b10c00d54d41cbd5799c84c |
| publicationDate | 2019-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110171974-A |
| titleOfInvention | A kind of ceramic target and preparation method thereof |
| abstract | The invention relates to the technical field of sputtering targets, in particular to a ceramic target and a preparation method thereof. The preparation method includes: A) homogeneously mixing the copper-zinc-tin-selenium powder and rubidium fluoride powder, and the homogeneously mixed powder is pre-pressed to obtain a green body; B) vacuum Under the conditions of , the green body is heated to 200-400 ℃, and the temperature is kept; C) then heated to 600-700 ℃, and hot-pressed and sintered at 25-50 MPa after heat preservation, and the target blank is obtained after cooling and decompression. ; D) machining the target blank to obtain a ceramic target. The purity and density of the ceramic target prepared by the preparation method provided by the present invention are high, and the components are uniform. It provides a theoretical reference for the preparation of high-performance doped targets. The results show that the purity of the ceramic target prepared by the present invention is more than 99.99%, the density is 5.53-5.58 g/cm 3 , and the relative density is 94-95%. |
| priorityDate | 2019-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.