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filingDate 2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c48b8199408d7aaa23f0d99889074989
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publicationDate 2019-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-110165056-A
titleOfInvention A kind of CTM memory and preparation method thereof
abstract The invention belongs to the technical field of electronic devices, and discloses an organic-inorganic hybrid CTM memory of zirconia and zirconium silicate nanoparticles and a preparation method thereof. The CTM memory includes a lower electrode, a base, a storage layer and an upper electrode layer stacked from bottom to top; The storage layer is a mixed layer of organic and inorganic materials containing zirconia and zirconium silicate nanoparticles. The invention adopts the solution method to prepare the storage layer, realizes the preparation of low-cost CTM, has less investment in equipment and raw materials, and can realize large-scale industrial application. In addition, the storage layer prepared by the preparation method of the present invention has the functions of a tunneling layer, a storage layer and a barrier layer at the same time, which reduces the difficulty of the process and reduces the degradation of device performance caused by complex processes.
priorityDate 2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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