http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110133966-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_52e8d07b27d40fe8f5b74203237d6e50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 |
| filingDate | 2019-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af506911f987eedacecd76963682fcdc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_500626a8f340712a73465a48f3296ac5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc8d67e373ddf64bf06154823b89664a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de814e52716bceee43db8aa1d6a95ed2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a83f803793253b9c76ccf22035e3ea85 |
| publicationDate | 2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110133966-A |
| titleOfInvention | Photoresist coating device |
| abstract | A photoresist coating device, comprising a cavity base, a cavity body, and a cavity top cover, the cavity base, the cavity body and the cavity top cover constitute a coating chamber; the coating sputtering area is located in the The inner wall of the cavity top cover, and the material coating the sputtering area is a hydrophilic wetting material. The hydrophilic material can reduce the contact angle between the liquid and the surface of the hydrophilic material, so that the liquid is not easy to stick to the sputtering area of the coating, and the fluidity of the liquid is increased; when the coating process is performed, due to The mixed liquid flying out due to centrifugal force reaches the coating sputtering area, which is easier to flow and discharge, avoids accumulation and reduces back splashing, thereby improving the working efficiency of the coating device. |
| priorityDate | 2019-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423437961 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54005808 |
Total number of triples: 17.