http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110104606-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ce77f9c79258e3cd528f7a160d3b2b2 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-02 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2019-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c18aee6471b498029bb123888024712a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7c43411faddb4e282a39b88c0f876f0 |
| publicationDate | 2019-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110104606-A |
| titleOfInvention | A package structure of a MEMS infrared sensor |
| abstract | The invention discloses a package structure of a MEMS infrared sensor, comprising: a bottom wafer with a placement groove for placing a MEMS infrared sensor chip in the middle and two vertical through-silicon holes on both sides; Two pads at both ends of the through hole; two connecting wires respectively connecting the two ends of the MEMS infrared sensor chip and the pad at the top of the through silicon hole; solder deposited on the top edge of the bottom wafer; soldered by solder An upper wafer of a sealed cavity is formed on top of the bottom wafer and between the bottom wafer and the bottom wafer. The present invention solves the above-mentioned problems of high packaging cost, slow efficiency and flat packaging. |
| priorityDate | 2019-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.