Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F2013-15926 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F2013-15715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F2013-530233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F13-531 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F2013-530817 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F2013-15829 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F13-15707 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61F13-15731 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C5-04 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61F13-15 |
filingDate |
2017-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2021-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2021-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-110035722-B |
titleOfInvention |
Method for etching an absorbing structure |
abstract |
A method of fluid etching an absorber layer is disclosed. The method includes providing an absorber layer; providing a fluid etching process comprising one or more fluid nozzles, a carrier tape, and a stencil; ejecting fluid from the fluid ejection nozzle through the openings of the stencil; and d) cracking the absorber layer. |
priorityDate |
2016-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |