| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4dfa1a1dceaa392d1095c2492cbbe4da |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0912
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-805 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-02 |
| filingDate |
2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_465a2c2bd9b2b7c9d7a23b242b78842a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d018a284153e59fa17c77cc6795bba04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6f76a37481852f5701af65feedcc1da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb8711267522adc52af839959da641ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b18ce299e8b327608c61176cd072611a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23203927920e57e794102195bbb55753 |
| publicationDate |
2019-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110034228-A |
| titleOfInvention |
Multilayer film structure, its preparation method and application |
| abstract |
The invention provides a multi-layer film micro-nano processing method and its products and applications. The invention can be applied to the fabrication of qubits and qubit auxiliary devices in all multilayer film processes. It can realize the fabrication of three-dimensional qubits and qubit auxiliary devices, and can also be applied to the preparation of integrated multi-qubits in future quantum computing. Realize the preparation of 3-dimensional new quantum bits, and the processing precision reaches nanometer level. Negative superconducting quantum interferometer was fabricated by this technique. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113257988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110970698-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023045088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112582529-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626556-B2 |
| priorityDate |
2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |