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filingDate 2019-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-110006841-A
titleOfInvention A kind of detection method of O, C, III, V group elements in granular polysilicon
abstract The invention discloses a detection method for O, C, III and V group elements in granular polysilicon, including an experimental sample rod production detection unit, a comparative sample rod production detection unit and a granular polysilicon element content calculation unit. The granularity of itself does not have the conditions for direct low-temperature infrared detection. The conventional method of directly melting and pulling single crystals in a quartz crucible or using a container (such as a quartz tube) to melt into a rod shape will contaminate the sample to varying degrees and cannot be obtained. The actual impurity content of granular silicon. In this scheme, a high-purity master batch rod is used as the carrier of granular polysilicon, and the impurity concentration of the high-purity master batch sample rod and the impurity concentration of the mixed single crystal sample rod are respectively measured, and the particles can be accurately calculated by the subtraction method. impurity content in polysilicon.
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