http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109950253-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2019-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109950253-B |
| titleOfInvention | An array substrate and its manufacturing method and display panel |
| abstract | The invention discloses an array substrate, a manufacturing method thereof, and a display panel. The manufacturing method of the array substrate comprises the steps of: forming a first metal layer; passing nitrogen gas and ammonia gas on the first metal layer to form an adhesion layer; forming a first insulating layer; etching the first insulating layer to form via holes exposing the first metal layer; and forming a transparent electrode layer connected to the first metal layer through the via holes on the first insulating layer; an adhesion layer The adhesion with the first insulating layer is greater than the adhesion between the first metal layer and the first insulating layer. The adsorption force of the first insulating layer is increased by the adhesion layer, so that the etching speed of the first insulating layer is relatively slow, thereby improving the undercutting phenomenon. |
| priorityDate | 2019-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.