http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109935640-B
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
filingDate | 2019-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-109935640-B |
titleOfInvention | A kind of coating method of crystalline silicon solar cell |
abstract | The invention discloses a coating method for crystalline silicon solar cells, which belongs to the field of solar cell materials. , The flow ratio of silicon source and inert gas gas is 0.05~1:2.5~50 to deposit film, this method can obtain high-efficiency battery plated with silicon-based film with high uniformity and without any wrapping, saving the use of silicon source A low-cost preparation system such as a multi-electrode PECVD system is used to achieve the beneficial effect of mass production of coatings with low-cost equipment while ensuring that the uniformity of the coating reaches the existing standard. |
priorityDate | 2019-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.