http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109935508-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J29-54 |
| filingDate | 2019-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109935508-B |
| titleOfInvention | Field emission device structure integrated with ion collecting electrode and preparation method and application thereof |
| abstract | The invention discloses a field emission device structure integrated with an ion collecting electrode and an application method thereof, wherein the device structure comprises a cathode, a first insulating layer, an electron emission control electrode, a second insulating layer and an ion collecting electrode which are sequentially stacked from bottom to top; the ion collection electrode is a flat electrode with a plurality of micropores, and the pore diameter of each micropore is 1.5-3.5 mu m; the cathode, the first insulating layer, the electron emission control electrode and the second insulating layer are protruded upwards in the micropores to form an enclosing structure which is sequentially sleeved from inside to outside and from bottom to top; the electron emission control electrode in the micropore is higher than the plane of the ion collecting electrode to form a crater-shaped grid hole, and the height difference between the top end of the grid hole and the plane of the ion collecting electrode is more than 300 nm; the cathode in the micropore is positioned in the grid hole of the electron emission control electrode and is not higher than the top end of the grid hole; when the device structure works, the electron emission control electrode applies positive bias, and the ion collection electrode applies negative bias. |
| priorityDate | 2019-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.