http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109932105-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_933de8295ccd0a6835035dcd22da46b7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-14 |
| filingDate | 2017-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4791e5a4d6961e735db5179257d6be27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a3ab6b8feef26118fa9c80b4f3b6000 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b04e4babe149b59933ebab9f44ab067d |
| publicationDate | 2019-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109932105-A |
| titleOfInvention | Capacitive pressure sensor and preparation method thereof |
| abstract | The invention discloses a capacitive pressure sensor and a preparation method thereof. The capacitive pressure sensor comprises a bottom electrode, a top electrode, a first dielectric layer, a second dielectric layer and two supporting parts. The electrical layer, the second dielectric layer, and the two support parts are all located between the bottom electrode and the top electrode, and the two support parts are located at both ends of the bottom electrode. The dielectric layer is respectively located between the two support parts and the first dielectric layer is located between the second dielectric layer and the top electrode, the dielectric constant of the second dielectric layer is greater than the dielectric constant of the first dielectric layer, and the first dielectric layer is located between the second dielectric layer and the top electrode. A dielectric layer is an air layer or film. The capacitive pressure sensor provided by the present invention is provided with two dielectric layers, so that the dielectric constant of the capacitive pressure sensor can be increased, thereby increasing the capacitance value change rate of the capacitive pressure sensor, and improving the sensitivity and detection of the capacitive pressure sensor. scope. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111044183-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111044183-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111855029-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111855029-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111024296-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110470703-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113670187-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113670187-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112577642-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112577642-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116625326-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111855048-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111044181-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110916621-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111044181-A |
| priorityDate | 2017-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.