| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fb272959740a2231f287ac6bf4d190a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f18437cd0935a81f61a48b8d5c9cd4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b0c4cceff9d5d5d982b30eb7447b46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56595c6d8e4a6f1c29b6b0c66281b648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c26095f4eb1a22fe885de126e0b7e7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01590468eeb443bb6dd77d03ce94528e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8deb13578d3c2998882759fda9a4690 |
| publicationDate |
2019-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-109872962-A |
| titleOfInvention |
Manufacturing method of semiconductor device, storage medium, and substrate processing apparatus |
| abstract |
The present invention provides a method for manufacturing a semiconductor device, a storage medium, and a substrate processing apparatus, which solve the problem that the processing quality of the substrate is lowered due to the device structure formed on the substrate. The method for manufacturing a semiconductor device includes the steps of: receiving substrate data including either or both the number of layers and structures of devices formed on the substrate; and setting device parameters corresponding to the substrate data; A step of supporting the substrate corresponding to the substrate data above the substrate stage; a first temperature rise step of raising the temperature of the substrate based on the device parameters while being away from the surface of the substrate stage; after the first temperature rise step, the substrate is placed on a a process of placing a substrate; and a process of processing a substrate in a processing chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113496872-A |
| priorityDate |
2018-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |